MEMS1 Fabry-Perot Tunable Filter

A thin, compact spectroscopic device developed in-house that integrates a Fabry-Perot interferometer and actuator. Not only can it transmit light of the desired wavelength, but it also offers outstanding precision, accuracy, and high-speed operation.

1 MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts.

Expanding the Possibilities

Automation of Visual (Color) Inspection


Color determination of similar color parts
Color inspection of cosmetics

Future Applications


Plastics recycles

Smart agriculture

Application Examples

This device can be used in a variety of applications. We are expanding the range of applications by developing a lineup of devices that support a broader spectrum of wavelengths.

Reference

  1. Wideband visible wavelength range MEMS Fabry-Perot Tunable Filter with Ag alloy mirror.

Introduction and Application Examples

Exhibitions

Poster

China Hi-Tech Fair 2023 (November 15-19, 2023)

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